The Interfacial Engineering for the Fabrication of EpoxyMicrofluidic-photonic-integrated Devices on Glass Substrates，2009第四届中欧增强高聚物工艺与性能国际学术会议（6.8-6.12，桂林）-中国聚合物网,论文下载

The Interfacial Engineering for the Fabrication of EpoxyMicrofluidic-photonic-integrated Devices on Glass Substrates

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EpoxyMicrofluidic-photonic-integrated Devices

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分子表征

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2009第四届中欧增强高聚物工艺与性能国际学术会议（6.8-6.12，桂林）

简介：

FabricatingepoxySU-8-basedmicrofluidicandphotonicdevicesonglasssubstrates,suchaspyrexwafers,hasproventobeverydifficult.Thereasonisthatitishardtocompletelyremoveresidualmaterialbetweenpatternedstructureswhileobtainingsufficientbondingofthestructurestothepyrexsurface..

作者：

THOMAS KOWPAK, BENJAMIN R. WATTS, SHIPING ZHU, CHANG-QING XUAND ZHIYI ZHANG

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2009-08-03 9:58:27

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