writer：Chao Zhang, Abdelhamid Boudiba, Marie-Georges Olivier, Rony Snyders, Marc Debliquy
keywords：Gas sensor; Sputtering; Platinum; Palladium; Tungsten oxide
source：期刊
specific source：Sensors and Actuators B: Chemical
Issue time：2012年
1 at% platinum activated tungsten oxide (Pt–WO₃) and 1 at% palladium activated WO₃ (Pd–WO₃) films were grown on Al₂O₃ substrates by a simultaneous radio-frequency sputtering process. The as-sputtered films were thermally treated at 450 °C for 24 h. Phase structure and chemical composition of the as-sputtered and thermally treated films were analyzed by X-ray diffraction and X-ray photoelectron spectroscopy. Sensing characteristics of the Pt–WO₃ and Pd–WO₃ films, as well as a pure WO₃ film, were characterized with 25–200 ppm H₂, 25–200 ppm CO and 0.62–5 ppm NH₃ at various working temperatures and relative humidity of target gases. Effects of Pt and Pd on sensing characteristics of the sensors were compared and studied.