相关链接
联系方式
  • 通信地址:福建省 厦门市 思明南路422 号
  • 邮编:361005
  • 电话:0592-2186296
  • 传真:0592-2183937
  • Email:lilei@xmu.edu.cn
当前位置:> 首页 > 论文著作 > 正文
Facile Fabrication of Nanocellular Block Copolymer Thin Films Using Supercritical Carbon Dioxide
作者:Li L, Yokoyama H, Nemoto T, Sugiyama K
关键字:LITHOGRAPHY
论文来源:期刊

A novel, facile, and reproducible method of fabricating nanocells in thin films (see Figure) has been developed using a fluorinated block copolymer with a supercritical carbon dioxide (scCO2) soluble block as a template. The nanocells have an average spacing of 34 nm and a number density of 9 X 10(10) cm-2. The size of nanocellular structures is readily tunable by changing the saturation pressure of scCO2.