- Improvement of sensing characteristics of radio-frequency sputtered tungsten oxide films through surface modification by laser irradiation
- 来源：张超教授个人网站
2013-11-21
- To enhance sensing characteristics of semiconductor gas sensors, the surface morphology of sensing layer modified by laser irradiation was performed. Tungsten oxide (WO3) thin-films grown on Si/SiO2 wafers by radio-frequency sputtering were annealed and then irradiated by an excimer laser under various laser power densities. The effect of the laser irradiation on film surface morphology was studied by X-ray diffraction and atomic force microscopy. Gas sensors based on the laser-irradiated WO3 films demonstrated better responses to low concentration NO2 compared with the sensors without laser irradiation.
- [来源：中国聚合物网]